Integrated circuit device with well controlled surface proximity and method of manufacturing same

ABSTRACT

An integrated circuit device and method for manufacturing the integrated circuit device is disclosed. The disclosed method provides improved control over a surface proximity and tip depth of integrated circuit device. In an embodiment, the method achieves improved control by forming a doped region and a lightly doped source and drain (LDD) region in a source and drain region of the device. The doped region is implanted with a dopant type opposite the LDD region.

PRIORITY DATA

The present application is a continuation application of U.S. patentapplication Ser. No. 13/961,748, filed Aug. 7, 2013, which is acontinuation application of U.S. patent application Ser. No. 13/240,025,filed Sep. 22, 2011, which is a continuation application of U.S. patentapplication Ser. No. 12/816,519, filed Jun. 16, 2010, now U.S. Pat. No.8,236,659 issued on Aug. 7, 2012, each of which is hereby incorporatedby reference in its entirety.

TECHNICAL FIELD

The present disclosure relates to integrated circuit devices and methodsfor manufacturing integrated circuit devices.

BACKGROUND

The semiconductor integrated circuit (IC) industry has experienced rapidgrowth. In the course of IC evolution, functional density (i.e., thenumber of interconnected devices per chip area) has generally increasedwhile geometry size (i.e., the smallest component (or line) that can becreated using a fabrication process) has decreased. This scaling downprocess generally provides benefits by increasing production efficiencyand lowering associated costs. Such scaling down has also increased thecomplexity of processing and manufacturing ICs and, for these advancesto be realized, similar developments in IC manufacturing are needed. Forexample, as semiconductor devices, such as a metal-oxide-semiconductorfield-effect transistors (MOSFETs), are scaled down through varioustechnology nodes, strained source/drain features (e.g., stressorregions) have been implemented using epitaxial (epi) semiconductormaterials to enhance carrier mobility and improve device performance.Forming a MOSFET with stressor regions often implements epitaxiallygrown silicon (Si) to form raised source and drain features for ann-type device, and epitaxially grown silicon germanium (SiGe) to formraised source and drain features for a p-type device. Various techniquesdirected at shapes, configurations, and materials of these source anddrain features have been implemented to try and further improvetransistor device performance. Although existing approaches have beengenerally adequate for their intended purposes, they have not beenentirely satisfactory in all respects.

SUMMARY

The present disclosure provides for many different embodiments. One ofthe broader forms of an embodiment of the present invention involves amethod that includes: providing a semiconductor substrate; forming agate structure over the substrate; performing a first implantationprocess with a first dopant on the substrate, thereby forming a lightlydoped source and drain (LDD) region in the substrate, the LDD regionbeing interposed by the gate structure; performing a second implantationprocess with a second dopant on the substrate, the second dopant beingopposite the first dopant, thereby forming a doped region in thesubstrate, the doped region being interposed by the gate structure;forming spacers for the gate structure; and forming source and drainfeatures on each side of the gate structure.

Another one of the broader forms of an embodiment of the presentinvention involves a method that includes: providing a semiconductorsubstrate having a first region and a second region; forming first andsecond gate structures over the substrate in the first and secondregions, respectively; forming first and second lightly doped source anddrain (LDD) regions in the first and second regions, respectively;forming a dielectric layer over the substrate, including over the secondgate structure; forming a doped region in the substrate in the secondregion at either side of the second gate structure; forming spacers forthe first and second gate structures; forming a first recess in thesubstrate at either side of the first gate structure; epitaxially (epi)growing a first semiconductor material to fill the first recess; forminga second recess in the substrate at either side of the second gatestructure; and epitaxially (epi) growing a second semiconductor materialto fill the second recess, the second semiconductor material beingdifferent than the first semiconductor material.

According to another of the broader forms of the invention, a methodincludes: providing a semiconductor substrate having a first region anda second region; forming first and second gate structures over thesubstrate in the first and second regions, respectively; forming firstand second lightly doped source and drain (LDD) regions in the first andsecond regions, respectively; forming offset spacers on sidewalls of thefirst and second gate structures; forming a doped region in thesubstrate in the second region at either side of the second gatestructure; forming a first recess in the substrate at either side of thefirst gate structure; epitaxially (epi) growing a first semiconductormaterial to fill the first recess; forming main spacers for the firstand second gate structures; forming a second recess in the substrate ateither side of the second gate structure; and epitaxially (epi) growinga second semiconductor material to fill the second recess, the secondsemiconductor material being different than the first semiconductormaterial.

BRIEF DESCRIPTION OF THE DRAWINGS

The present disclosure is best understood from the following detaileddescription when read with the accompanying figures. It is emphasizedthat, in accordance with the standard practice in the industry, variousfeatures are not drawn to scale and are used for illustration purposesonly. In fact, the dimensions of the various features may be arbitrarilyincreased or reduced for clarity of discussion.

FIG. 1 is a flow chart of a method for fabricating an integrated circuitdevice according to an embodiment of the present disclosure.

FIGS. 2-10 are various diagrammatic cross-sectional views of anembodiment of an integrated circuit device during various fabricationstages according to the method of FIG. 1.

FIG. 11 is a flow chart of a method for fabricating an integratedcircuit device according to another embodiment of the presentdisclosure.

FIGS. 12-21 are various diagrammatic cross-sectional views of anembodiment of an integrated circuit device during various fabricationstages according to the method of FIG. 12.

DETAILED DESCRIPTION

It is understood that the following disclosure provides many differentembodiments, or examples, for implementing different features of theinvention. Specific examples of components and arrangements aredescribed below to simplify the present disclosure. These are, ofcourse, merely examples and are not intended to be limiting. Forexample, the formation of a first feature over or on a second feature inthe description that follows may include embodiments in which the firstand second features are formed in direct contact, and may also includeembodiments in which additional features may be formed between the firstand second features, such that the first and second features may not bein direct contact. In addition, the present disclosure may repeatreference numerals and/or letters in the various examples. Thisrepetition is for the purpose of simplicity and clarity and does not initself dictate a relationship between the various embodiments and/orconfigurations discussed.

FIG. 1 is a flow chart of an embodiment of a method 100 for fabricatingan integrated circuit device according to various aspects of the presentdisclosure. The method 100 begins at block 102 where a semiconductorsubstrate having first and second regions is provided. At block 104,first and second gate structures are formed over the substrate in thefirst and second regions, respectively. At block 106, first and secondlightly doped source and drain (LDD) regions are formed in the substratein the first and second regions, respectively. The method continues withblock 108 where a dielectric layer is formed over the semiconductorsubstrate. At block 110, a doped region is formed in the substrate inthe second region at either side of the second gate structure. The dopedregion includes a dopant of a type opposite a dopant used to form thesecond LDD region. The method 100 at block 112 includes forming mainspacers for the first and second gate structures.

At blocks 114 and 116, a first protection layer is formed over thesecond region, and a first recess is formed in the substrate at eitherside of the first gate structure in the first region. The methodcontinues at block 118 where a first semiconductor material isepitaxially grown to fill the first recess, thereby forming source anddrain features in the first region. At blocks 120 and 122, the firstprotection layer is removed from the second region, a second protectionlayer is formed over the first region, and a second recess is formed inthe substrate at either side of the second gate structure. At block 124,a second semiconductor material is epitaxially grown to fill the secondrecess, thereby forming source and drain features for the second region.The method 100 continues with block 126 where fabrication of theintegrated circuit device is completed. Additional steps can be providedbefore, during, and after the method 100, and some of the stepsdescribed can be replaced or eliminated for additional embodiments ofthe method. The discussion that follows illustrates various embodimentsof an integrated circuit device that can be fabricated according to themethod 100 of FIG. 1.

FIGS. 2-10 are various diagrammatic cross-sectional views of anembodiment of an integrated circuit device 200 during variousfabrication stages according to the method 100 of FIG. 1. FIGS. 2-10have been simplified for the sake of clarity to better understand theinventive concepts of the present disclosure. In the depictedembodiment, as will be further discussed below, the integrated circuitdevice 200 includes field effect transistor devices, specifically ann-channel field effect transistor (NFET) and a p-channel field effecttransistor (PFET). The integrated circuit device 200 can further includememory cells and/or logic circuits, passive components such asresistors, capacitors, inductors, and/or fuses; and active components,such as metal-oxide-semiconductor field effect transistors (MOSFETs),complementary metal-oxide-semiconductor transistors (CMOSs), highvoltage transistors, and/or high frequency transistors; other suitablecomponents; or combinations thereof. Additional features can be added inthe integrated circuit device 200, and some of the features describedbelow can be replaced or eliminated for additional embodiments of theintegrated circuit device 200.

In FIG. 2, a substrate 210 is provided. In the depicted embodiment, thesubstrate 210 is a semiconductor substrate including silicon. Thesubstrate may be a p-type or n-type substrate. Alternatively, thesubstrate 210 comprises another elementary semiconductor, such asgermanium; a compound semiconductor including silicon carbide, galliumarsenic, gallium phosphide, indium phosphide, indium arsenide, and/orindium antimonide; an alloy semiconductor including SiGe, GaAsP, AlInAs,AlGaAs, GaInAs, GaInP, and/or GaInAsP; or combinations thereof. In yetanother alternative, the substrate 210 is a semiconductor on insulator(SOI). In other alternatives, semiconductor substrate 210 may include adoped epi layer, a gradient semiconductor layer, and/or a semiconductorlayer overlying another semiconductor layer of a different type, such asa silicon layer on a silicon germanium layer.

The substrate 210 may include various doped regions depending on designrequirements as known in the art (e.g., p-type wells or n-type wells).The doped regions may be doped with p-type dopants, such as boron orBF₂; n-type dopants, such as phosphorus or arsenic; or a combinationthereof. The doped regions may be formed directly on the substrate 210,in a P-well structure, in a N-well structure, in a dual-well structure,or using a raised structure. The integrated circuit device 200 includesa device region 212 and another device region 214 of the substrate 210,and thus, the substrate 210 may include various doped regions configuredfor a particular device in each region 212 and 214. In the depictedembodiment, the NFET will be formed in the device region 212, which isreferred to as an NFET device region, and the PFET device will be formedin the device region 214, which is referred to as a PFET device region.Accordingly, the device region 212 may include a doped region configuredfor an NFET device, and the device region 214 may include a doped regionconfigured for a PFET device.

Isolation feature 216 is formed in the substrate 210 to isolate variousregions of the substrate 210, such as device regions 212 and 214. Theisolation feature 216 also isolates the device regions 212 and 214 fromother devices (not shown). The isolation feature 216 utilizes isolationtechnology, such as local oxidation of silicon (LOCOS) and/or shallowtrench isolation (STI), to define and electrically isolate the variousregions. The isolation feature 216 comprises silicon oxide, siliconnitride, silicon oxynitride, other suitable materials, or combinationsthereof. The isolation feature 216 is formed by any suitable process. Asone example, forming an STI includes a photolithography process, etchinga trench in the substrate (for example, by using a dry etching and/orwet etching), and filling the trench (for example, by using a chemicalvapor deposition process) with one or more dielectric materials. Forexample, the filled trench may have a multi-layer structure, such as athermal oxide liner layer filled with silicon nitride or silicon oxide.In another example, the STI structure may be created using a processingsequence such as: growing a pad oxide, forming a low pressure chemicalvapor deposition (LPCVD) nitride layer, patterning an STI opening usingphotoresist and masking, etching a trench in the substrate, optionallygrowing a thermal oxide trench liner to improve the trench interface,filling the trench with oxide, using chemical mechanical polishing (CMP)processing to etch back and planarize, and using a nitride strippingprocess to remove the silicon nitride.

The integrated circuit device 200 includes a gate structure 220 for theNFET device and a gate structure 221 for the PFET device. The gatestructure 220 is disposed over the substrate 210 in NFET device region212, and the gate structure 221 is disposed over the substrate 210 inPFET device region 214. In the depicted embodiment, the gate structures220 and 221 include a gate dielectric layer 222, a gate layer 224(referred to as a gate electrode), and a hard mask layer 226. The gatedielectric layer 222, gate layer 224, and hard mask layer 226 form gatestacks for the gate structures 220 and 221. The gate stacks 220 and 221may include additional layers as is known in the art. The gatestructures 220 and 221 are formed by deposition, lithography patterning,etching processes, or combination thereof. The deposition processesinclude chemical vapor deposition (CVD), physical vapor deposition(PVD), atomic layer deposition (ALD), high density plasma CVD (HDPCVD),metal organic CVD (MOCVD), remote plasma CVD (RPCVD), plasma enhancedCVD (PECVD), plating, other suitable deposition methods, or combinationsthereof. The lithography patterning processes include photoresistcoating (e.g., spin-on coating), soft baking, mask aligning, exposure,post-exposure baking, developing the photoresist, rinsing, drying (e.g.,hard baking), other suitable processes, or combinations thereof.Alternatively, the photolithography exposing process is implemented orreplaced by other proper methods, such as maskless photolithography,electron-beam writing, or ion-beam writing. The etching processesinclude dry etching, wet etching, other etching methods, or combinationsthereof. The gate structures 220 and 221 may be formed simultaneously,utilizing the same processing steps and processing materials;independently of one another, utilizing varying processing steps andprocessing materials; or using a combination of simultaneous andindependent processing steps and processing materials.

The gate dielectric layer 222 is formed over the substrate 210 andincludes a dielectric material, such as silicon oxide, siliconoxynitride, silicon nitride, a high-k dielectric material, othersuitable dielectric material, or combinations thereof. Exemplary high-kdielectric materials include HfO₂, HfSiO, HfSiON, HfTaO, HfTiO, HfZrO,other suitable materials, or combinations thereof. The gate dielectriclayer 222 may include a multilayer structure. For example, the gatedielectric layer 222 may include an interfacial layer, and a high-kdielectric material layer formed on the interfacial layer. An exemplaryinterfacial layer may be a grown silicon oxide layer formed by a thermalprocess or ALD process.

The gate layer 224 is formed over the gate dielectric layer 222. In thepresent embodiment, the gate layer 224 is a polycrystalline silicon(polysilicon) layer. The polysilicon layer may be doped for properconductivity. Alternatively, the polysilicon is not necessarily doped ifa dummy gate is to be formed and replaced in a subsequent gatereplacement process. Alternatively, the gate layer 224 could include aconductive layer having a proper work function, therefore, the gatelayer 224 can also be referred to as a work function layer. The workfunction layer comprises any suitable material, such that the layer canbe tuned to have a proper work function for enhanced performance of theassociated device. For example, if a p-type work function metal(p-metal) for the PFET device is desired, TiN or TaN may be used. On theother hand, if an n-type work function metal (n-metal) for the NFETdevice is desired, Ta, TiAl, TiAlN, or TaCN, may be used. The workfunction layer may include doped conducting oxide materials. The gatelayer 224 may include other conductive materials, such as aluminum,copper, tungsten, metal alloys, metal silicide, other suitablematerials, or combinations thereof. For example, where the gate layer224 includes a work function layer, another conductive layer can beformed over the work function layer.

The hard mask layer 226 is formed over the gate layer 224. The hard masklayer 226 includes silicon oxide, silicon nitride, silicon oxynitride,silicon carbide, other suitable dielectric material, or combinationsthereof. The hard mask layer 226 may have a multi-layer structure.

In FIG. 3, lightly doped source/drain (LDD) regions are formed in sourceand drain regions of the substrate 210 in the device regions 212 and214. In the depicted embodiment, LDD regions 228 are formed in thesubstrate 210, interposed by the gate structure 220, in the NFET deviceregion 212; and LDD regions 230 are formed in the substrate 210,interposed by the gate structure 221, in the PFET device region 214. TheLDD regions 228 and 230 are aligned with the sidewalls of the gatestacks of the gate structures 220 and 221. The LDD regions 228 and 230are formed by an ion implantation process, diffusion process, othersuitable process, or combination thereof. The PFET device region 214 maybe protected during formation of the LDD regions 228 in the NFET deviceregion 212, and the NFET device region 212 may be protected duringformation of the LDD regions 230 in the PFET device region 214. Forexample, a photoresist layer or hard mask layer may be deposited andpatterned over the PFET device region 214 during formation of the LDDregions 228 in the NFET device region 212, and a photoresist layer orhard mask layer can be deposited and patterned over the NFET deviceregion 212 during formation of the LDD regions 230 in the PFET deviceregion 214. In the depicted embodiment, the LDD regions 228 for the NFETdevice (NLDD) are doped with an n-type dopant, such as phosphorous orarsenic, and the LDD regions 230 for the PFET device (PLDD) are dopedwith a p-type dopant, such as boron or BF₂.

In FIG. 4, a dielectric layer 232 is formed over the substrate 210, andan doped feature is formed in the substrate 210 in the PFET deviceregion 214. In the depicted embodiment, the dielectric layer 232comprises an oxide material, such as silicon oxide or siliconoxynitride. Alternatively, the dielectric layer 232 comprises siliconnitride. A resist layer (or hard mask layer) 234 is deposited andpatterned over the NFET device region 212, and an implantation process236 is performed on the PFET device region 214 to form doped regions 238in the substrate 210 in the PFET device region 214. The implantationprocess 236 utilizes a dopant type opposite the dopant type of the LDDregions 230. In the depicted embodiment, since the LDD regions 230 aredoped with a p-type dopant, the doped regions 238 are doped with ann-type dopant, such as phosphorous or arsenic. The dielectric layer 232acts as a mask during the implantation process 236, such that the dopedregions 238 in the substrate 210 are interposed by the gate structure221, similar to the LDD regions 230, yet the doped regions 238 arespaced a distance away from the gate structure 221. In particular, thedoped regions 238 are spaced away from the gate structure 221 by adistance equal to the thickness (t) of the dielectric layer 232 disposedon the sidewalls of the gate structure 221. After the implantationprocess 236, an LDD region 230A remains in the substrate 210 in the PFETdevice region 214. As further discussed below, since the doped regions238 have a different doping species than the remaining LDD regions 230A,the etching rate of the substrate 210 including the doped regions 238 isgreater than the substrate 210 including the LDD regions 230A.Thereafter, the patterned resist layer 234 is removed by a photoresiststripping process, for example.

In FIG. 5, spacers are formed for gate structures 220 and 221. In thedepicted embodiment, spacer liner 240 and spacers 242 are formed by asuitable process. For example, a dielectric layer, such as a siliconnitride layer, is blanket deposited over the integrated circuit device200, including over the dielectric layer 232; and then, the siliconnitride layer and dielectric layer 232 are anisotropically etched toremove the dielectric layer 232 to form spacer liner 240 and the siliconnitride layer to form spacers 242 as illustrated in FIG. 5. The spacerliner 240 and spacers 242 are positioned adjacent the sidewalls of thegate stacks (gate dielectric layer 222, gate layer 224, and hard masklayer 226) of the gate structures 220 and 221. Alternatively, thespacers 242 include another dielectric material, such as silicon oxide,silicon oxynitride, or combinations thereof. The spacer liner 240 mayalso comprise another suitable dielectric material.

In FIGS. 6-10, source/drain engineering is performed to configure thesource/drain region of the NFET device region 212 for an NFET device andto configure the source/drain region of the PFET device region 214 for aPFET device. In FIGS. 6 and 7, source/drain (S/D) features are formed inthe NFET device region 212. For example, in FIG. 6, portions of thesubstrate 210 are removed at either side of the gate structure 220 inthe NFET device region 212, particularly in the source and drain regionof the NFET device. In the depicted embodiment, a capping layer 244,another capping layer 246, and a photoresist layer 248 are formed overthe integrated circuit device 200 and patterned to protect the PFETdevice during processing of the NFET device region 212. The cappinglayer 244 may comprise an oxide material, and capping layer 246 maycomprise a nitride material. The capping layers 244 and 246 may compriseother suitable materials as known in the art. The photoresist layer 248may include an antireflective coating layer, such as a bottomantireflective coating (BARC) layer and/or a top antireflective coating(TARC) layer. The patterned layers 244, 246, and 248 may be formed by aphotolithography process. An exemplary photolithography process mayinclude processing steps of photoresist coating, soft baking, maskaligning, exposing, post-exposure baking, developing photoresist, andhard baking. The photolithography process may also be implemented orreplaced by other proper techniques, such as maskless photolithography,electron-beam writing, ion-beam writing, and molecular imprint.

An etching process then removes portions of the substrate 210 to formrecesses 250 in the substrate 210. The recesses 250 are formed in thesource and drain regions of the NFET device in the NFET device region212. The etching process includes a dry etching process, wet etchingprocess, or combination thereof. In the depicted embodiment, the etchingprocess utilizes a combination dry and wet etching. The dry and wetetching processes have etching parameters that can be tuned, such asetchants used, etching temperature, etching solution concentration,etching pressure, source power, RF bias voltage, RF bias power, etchantflow rate, and other suitable parameters. For example, the dry etchingprocess may utilize an etching pressure of about 1 mT to about 200 mT, asource power of about 200 W to about 2000 W, an RF bias voltage of about0 V to about 100 V, and an etchant that includes NF₃, Cl₂, SF₆, He, Ar,CF₄, or combinations thereof. In an example, the dry etching processincludes an etching pressure of about 1 mT to about 200 mT, a sourcepower of about 200 W to about 2000 W, an RF bias voltage of about 0 V toabout 100 V, a NF₃ gas flow of about 5 sccm to about 30 sccm, a Cl₂ gasflow of about 0 sccm to about 100 sccm, an He gas flow of about 0 sccmto about 500 sccm, and an Ar gas flow of about 0 sccm to about 500 sccm.In another example, the etching process includes an etching pressure ofabout 1 mT to about 200 mT, a source power of about 200 W to about 2000W, an RF bias voltage of about 0 V to about 100 V, a SF₆ gas flow ofabout 5 sccm to about 30 sccm, a Cl₂ gas flow of about 0 sccm to about100 sccm, an He gas flow of about 0 sccm to about 500 sccm, and an Argas flow of about 0 sccm to about 500 sccm. In yet another example, theetching process includes an etching pressure of about 1 mT to about 200mT, a source power of about 200 W to about 2000 W, an RF bias voltage ofabout 0 V to about 100 V, a CF₄ gas flow of about 5 sccm to about 100sccm, a Cl₂ gas flow of about 0 sccm to about 100 sccm, an He gas flowof about 0 sccm to about 500 sccm, and an Ar gas flow of about 0 sccm toabout 500 sccm. The wet etching solutions may include NH₄OH, HF(hydrofluoric acid), TMAH (tetramethylammonium hydroxide), othersuitable wet etching solutions, or combinations thereof. In an example,the wet etching process first implements a 100:1 concentration of an HFsolution at room temperature, and then implements a NH₄OH solution at atemperature of about 20° C. to about 60° C. In another example, the wetetching process first implements a 100:1 concentration of an HF solutionat room temperature, and then implements a TMAH solution at atemperature of about 20° C. to about 60° C. After the etching process, apre-cleaning process may be performed to clean the recesses 250 with ahydrofluoric acid (HF) solution or other suitable solution.

In FIG. 7, a semiconductor material is deposited in the recesses 250 toform a strained structure in the NFET device region 212. Thesemiconductor material forms source and drain features 252 in therecesses 250. The source and drain features 252 may alternatively bereferred to as raised source and drain regions. In the depictedembodiment, an epitaxy or epitaxial (epi) process is performed todeposit the semiconductor material in the recesses 250. The epi processmay include a selective epitaxy growth (SEG) process, CVD depositiontechniques (e.g., vapor-phase epitaxy (VPE) and/or ultra-high vacuum CVD(UHV-CVD)), molecular beam epitaxy, other suitable epi processes, orcombination thereof. The epi process may use gaseous and/or liquidprecursors, which may interact with the composition of the substrate210. In the depicted embodiment, the patterned photoresist layer 248protecting the PFET device region 214 is removed before the epi process.Further, in the depicted embodiment, the source and drain features 252include epitaxially grown silicon (epi Si). The Si epi source and drainfeatures 252 of the NFET device associated with the gate structure 220may be in-situ doped or undoped during the epi process. For example, theSi epi source and drain features 252 may be doped with phosphorous toform Si:P source and drain features. When the source and drain featuresare undoped, it is understood that they may be doped in a subsequentprocess. The doping may be achieved by an ion implantation process,plasma immersion ion implantation (PIII) process, gas and/or solidsource diffusion process, other suitable process, or combinationsthereof. The source and drain features 252 may further be exposed toannealing processes, such as a rapid thermal annealing process.Thereafter, the patterned capping layers 246 and 248 are removed by asuitable process.

In FIGS. 8A, 8B, and 9, source/drain (S/D) features are formed in thePFET device region 214. For example, in FIG. 8A, portions of thesubstrate 210 are removed at either side of the gate structure 221 inthe PFET device region 214, particularly in the source and drain regionof the PFET device. In the depicted embodiment, a capping layer 254,another capping layer 256, and a photoresist layer 258 are formed overthe integrated circuit device 200 and patterned to protect the NFETdevice during processing of the PFET device region 214. The cappinglayer 254 may comprise an oxide material, and capping layer 256 maycomprise a nitride material. The capping layers 254 and 256 may compriseother suitable materials as known in the art. The photoresist layer 258may include an antireflective coating layer, such as a BARC layer and/ora TARC layer. The patterned layers 254, 256, and 258 may be formed by aphotolithography process. An exemplary photolithography process mayinclude processing steps of photoresist coating, soft baking, maskaligning, exposing, post-exposure baking, developing photoresist, andhard baking. The photolithography process may also be implemented orreplaced by other proper techniques, such as maskless photolithography,electron-beam writing, ion-beam writing, and molecular imprint.

An etching process then removes portions of the substrate 210 to formrecesses 260 in the substrate 210. The recesses 260 are formed in thesource and drain regions of the PFET device in the PFET device region214. The etching process includes a dry etching process, wet etchingprocess, or combination thereof. In the depicted embodiment, the etchingprocess utilizes a combination dry and wet etching. The dry and wetetching processes have etching parameters that can be tuned, such asetchants used, etching temperature, etching solution concentration,etching pressure, source power, RE bias voltage, RF bias power, etchantflow rate, and other suitable parameters. For example, the dry etchingprocess may utilize an etching pressure of about 1 mT to about 200 mT, asource power of about 200 W to about 2000 W, an RF bias voltage of about0 V to about 100 V, and an etchant that includes NF₃, Cl₂, SF₆, He, Ar,CF₄, or combinations thereof. In an example, the dry etching processincludes an etching pressure of about 1 mT to about 200 mT, a sourcepower of about 200 W to about 2000 W, an RF bias voltage of about 0 V toabout 100 V, a NF₃ gas flow of about 5 sccm to about 30 sccm, a Cl₂ gasflow of about 0 sccm to about 100 sccm, an He gas flow of about 0 sccmto about 500 sccm, and an Ar gas flow of about 0 sccm to about 500 sccm.In another example, the etching process includes an etching pressure ofabout 1 mT to about 200 mT, a source power of about 200 W to about 2000W, an RF bias voltage of about 0 V to about 100 V, a SF₆ gas flow ofabout 5 sccm to about 30 sccm, a Cl₂ gas flow of about 0 sccm to about100 sccm, an He gas flow of about 0 sccm to about 500 sccm, and an Argas flow of about 0 sccm to about 500 sccm. In yet another example, theetching process includes an etching pressure of about 1 mT to about 200mT, a source power of about 200 W to about 2000 W, an RF bias voltage ofabout 0 V to about 100 V, a CF₄ gas flow of about 5 sccm to about 100sccm, a Cl₂ gas flow of about 0 sccm to about 100 sccm, an He gas flowof about 0 sccm to about 500 sccm, and an Ar gas flow of about 0 sccm toabout 500 sccm. The wet etching solutions may include NH₄OH, HF(hydrofluoric acid), TMAH (tetramethylammonium hydroxide), othersuitable wet etching solutions, or combinations thereof. In an example,the wet etching process first implements a 100:1 concentration of an HFsolution at room temperature, and then implements a NH₄OH solution at atemperature of about 20° C. to about 60° C. (for example, to form a{111} facet). In another example, the wet etching process firstimplements a 100:1 concentration of an HF solution at room temperature,and then implements a TMAH solution at a temperature of about 20° C. toabout 60° C. (for example, to form a {111} facet). After the etchingprocess, a pre-cleaning process may be performed to clean the recesses260 with a hydrofluoric acid (HF) solution or other suitable solution.

The etching profile of the recesses 260 enhances performance of theintegrated circuit device 200. In FIG. 8B, the PFET device region 214 ofthe integrated circuit device 200 is enlarged for better understandingof the etching profile of recesses 260. The etching profile of therecesses 260 defines source and drain regions of the PFET device, andthe etching profile of the recesses is defined by facets 261A, 261B,261C, 261D, 261E, and 261F of the substrate 210. The facets 261A, 261B,261D, and 261E may be referred to as shallow facets, and the facets 261Cand 261F may be referred to as bottom facets. In the depictedembodiment, the etching profile of the recesses 260 is defined by facets261A, 261B, 261D, and 261E in a {111} crystallographic plane of thesubstrate 210, and facets 261C and 261F in a {100} crystallographicplane of the substrate 210. An angle α₁ between the shallow facets 261Aand 261B is from about 45.0° to about 80.0°, and an angle θ₁ between thefacets 261B and 261C is from about 50.0° to about 70.0°. An angle α₂between the shallow facets 261C and 261D is from about 45.0° to about80.0°, and an angle θ₂ between the facets 261E and 261F of the substrate210 is from about 50.0° to about 70.0°. In the depicted embodiment, α₁and α₂ are about 54.7°, and θ₁ and θ₂ are about 54.7°.

The recesses 260 further define a surface proximity and a tip depth (orheight). The surface proximity defines a distance that a top surface ofthe substrate 210 extends from a sidewall of the gate structure (i.e.,gate stack including gate dielectric layer 222, gate layer 224, and hardmask layer 226) to the recess 260 (or when the recess is filled, asource and drain feature). In the depicted embodiment, the disclosedetching profile of the recesses 260 achieves a surface proximity ofabout 1 nm to about 3 nm. The tip depth defines a distance between a topsurface of the substrate 210 and an intersection of the facets 261A and261B (or an intersection of the facets 261D and 261E). In the depictedembodiment, the etching profile of the recesses 260 achieves a tip depthof about 5 nm to about 10 nm.

The etching profile of the recesses 260, which improves deviceperformance, is achieved by the method 100 described herein. Typically,to enhance the performance of integrated circuit device 200, a trade-offoccurs. For example, conventional processing reduces the surfaceproximity to improve saturation current, which often results in a largertip height, thus leading to increased short channel effects and reducedon/off speed of the integrated circuit device. Accordingly, precisecontrol over the etching profile of the recesses 260 is desired,particularly precise control over the resulting surface proximity andtip shape of the source and drain regions. The disclosed method 100provides this desired control, resulting in the etching profile ofrecesses 260 as described with reference to FIGS. 8A and 8B. Inparticular, referring to FIG. 4 above, doped regions 238 were formed inthe source and drain regions of the PFET device, leaving LDD regions230A. As noted above, additional implantation process implemented toform the doped regions 238 enhances the etching rate of a surface areaof the substrate 210 to etching processes used to from the recesses 260.In particular, a difference in etching rate between substrate 210including the doped regions 238 and the substrate 210 including the LDDregions 230A is increased. The remaining LDD regions 230A can thus actas a dry etch slow down and wet etch stop to the etching processes usedto form the recesses 260, allowing the LDD regions 230A to be designedto achieve a desired surface proximity and tip depth.

In FIG. 9, a semiconductor material is deposited in the recesses 260 toform a strained structure in the PFET device region 214. In the depictedembodiment, an epitaxy or epitaxial (epi) process is performed todeposit the semiconductor material in the recesses 260. The epi processmay include a selective epitaxy growth (SEG) process, CVD depositiontechniques (e.g., vapor-phase epitaxy (VPE) and/or ultra-high vacuum CVD(UHV-CVD)), molecular beam epitaxy, other suitable epi processes, orcombination thereof. The epi process may use gaseous and/or liquidprecursors, which may interact with the composition of the substrate210. The deposited semiconductor material is different from thesubstrate 210. Accordingly, the channel region of the PFET device isstrained or stressed to enhance carrier mobility of the device andenhance device performance. In the depicted embodiment, the patternedphotoresist layer 258 protecting the NFET device region 212 is removedbefore the epi process. Further, in the depicted embodiment, silicongermanium (SiGe) is deposited by an epi process in the recesses 260 ofthe substrate 210 to form SiGe source and drain features 262 in acrystalline state on the silicon substrate 210. The SiGe source anddrain features 262 may alternatively be referred to as raised source anddrain regions. The source and drain features 262 of the PFET deviceassociated with the gate structure 221 may be in-situ doped or undopedduring the epi process. When the source and drain features are undoped,it is understood that they may be doped in a subsequent process. Thedoping may be achieved by an ion implantation process, plasma immersionion implantation (PHI) process, gas and/or solid source diffusionprocess, other suitable process, or combinations thereof. The source anddrain features 262 may further be exposed to annealing processes, suchas a rapid thermal annealing process.

Thereafter, the patterned capping layers 254 and 256 are removed by asuitable process as illustrated in FIG. 10. The integrated circuitdevice 200 continues with processing to complete fabrication asdiscussed briefly below. For example, heavily doped source/drain (HDD)regions for the NFET device in the NFET device region 212 may be formedby ion implantation of n-type dopants, such as phosphorous or arsenic,and HDD regions for the PFET device in the PFET device region 214 may beformed by ion implantation of p-type dopants, such as boron. It isunderstood that the HDD regions of the NFET and PFET device regions 212and 214 may be formed earlier than in the depicted embodiment.Additionally, silicide features are formed on the raised source/drainfeatures, for example, to reduce the contact resistance. The silicidefeatures may be formed on the source and drain regions by a processincluding depositing a metal layer, annealing the metal layer such thatthe metal layer is able to react with silicon to form silicide, and thenremoving the non-reacted metal layer.

An inter-level dielectric (ILD) layer is formed on the substrate and achemical mechanical polishing (CMP) process is further applied to thesubstrate to planarize the substrate. Further, a contact etch stop layer(CESL) may be formed on top of the gate structures 220 and 221 beforeforming the ILD layer. In an embodiment, the gate electrode 224 remainspoly in the final device. In another embodiment, the poly is removed andreplaced with a metal in a gate last or gate replacement process. In agate last process, the CMP process on the ILD layer is continued toexpose the poly of the gate structures, and an etching process isperformed to remove the poly, thereby forming trenches. The trenches arefilled with a proper work function metal (e.g., p-type work functionmetal and n-type work function metal) for the PFET devices and the NFETdevices.

A multilayer interconnection (MLI) including metal layers andinter-metal dielectric (IMD) is formed over the substrate 210 toelectrically connect various features or structures of the integratedcircuit device 200. The multilayer interconnection includes verticalinterconnects, such as conventional vias or contacts, and horizontalinterconnects, such as metal lines. The various interconnection featuresmay implement various conductive materials including copper, tungstenand silicide. In one example, a damascene process is used to form coppermultilayer interconnection structure.

FIG. 11 is a flow chart of another embodiment of a method 300 forfabricating an integrated circuit device according to various aspects ofthe present disclosure. The method 300 begins at block 302 where asemiconductor substrate having first and second regions is provided. Atblock 304, first and second gate structures are formed over thesubstrate in the first and second regions, respectively. At block 306,first and second lightly doped source and drain (LDD) regions are formedin the substrate in the first and second regions, respectively. Themethod continues with block 308 where a offset spacers are formed on thesidewalls of the first and second gate structures. At block 310, a dopedregion is formed in the substrate in the second region at either side ofthe second gate structure. The doped region includes a dopant of a typeopposite a dopant used to form the second LDD region.

At blocks 312 and 314, a first protection layer is formed over thesecond region, and a first recess is formed in the substrate at eitherside of the first gate structure in the first region. The methodcontinues at block 316 where a first semiconductor material isepitaxially grown to fill the first recess, thereby forming source anddrain features in the first region. At block 318, the first protectionlayer is removed from the second region, and main spacers are formed forthe first and second gate structures. The main spacers may be formedadjacent the sidewall spacers. At blocks 320 and 322, a secondprotection layer is formed over the first region, and a second recess isformed in the substrate at either side of the second gate structure. Atblock 324, a second semiconductor material is epitaxially grown to fillthe second recess, thereby forming source and drain features for thesecond region. The method 300 continues with block 326 where fabricationof the integrated circuit device is completed. Additional steps can beprovided before, during, and after the method 300, and some of the stepsdescribed can be replaced or eliminated for additional embodiments ofthe method. The discussion that follows illustrates various embodimentsof an integrated circuit device that can be fabricated according to themethod 300 of FIG. 11.

FIGS. 12-21 are various diagrammatic cross-sectional views of anembodiment of an integrated circuit device 400 during variousfabrication stages according to the method 300 of FIG. 11. FIGS. 12-21have been simplified for the sake of clarity to better understand theinventive concepts of the present disclosure. In the depictedembodiment, as will be further discussed below, the integrated circuitdevice 400 includes field effect transistor devices, specifically ann-channel field effect transistor (NFET) and a p-channel field effecttransistor (PFET). The integrated circuit device 400 can further includememory cells and/or logic circuits, passive components such asresistors, capacitors, inductors, and/or fuses; and active components,such as metal-oxide-semiconductor field effect transistors (MOSFETs),complementary metal-oxide-semiconductor transistors (CMOSs), highvoltage transistors, and/or high frequency transistors; other suitablecomponents; or combinations thereof. Additional features can be added inthe integrated circuit device 400, and some of the features describedbelow can be replaced or eliminated for additional embodiments of theintegrated circuit device 400.

In FIG. 12, a substrate 410 is provided. In the depicted embodiment, thesubstrate 410 is a semiconductor substrate including silicon. Thesubstrate may be a p-type or n-type substrate. Alternatively, thesubstrate 410 comprises another elementary semiconductor, such asgermanium; a compound semiconductor including silicon carbide, galliumarsenic, gallium phosphide, indium phosphide, indium arsenide, and/orindium antimonide; an alloy semiconductor including SiGe, GaAsP, AlInAs,AlGaAs, GaInAs, GaInP, and/or GaInAsP; or combinations thereof. In yetanother alternative, the substrate 410 is a semiconductor on insulator(SOI). In other alternatives, semiconductor substrate 410 may include adoped epi layer, a gradient semiconductor layer, and/or a semiconductorlayer overlying another semiconductor layer of a different type, such asa silicon layer on a silicon germanium layer.

The substrate 410 may include various doped regions depending on designrequirements as known in the art (e.g., p-type wells or n-type wells).The doped regions may be doped with p-type dopants, such as boron orBF₂; n-type dopants, such as phosphorus or arsenic; or a combinationthereof. The doped regions may be formed directly on the substrate 410,in a P-well structure, in a N-well structure, in a dual-well structure,or using a raised structure. The integrated circuit device 400 includesa device region 412 and another device region 414 of the substrate 410,and thus, the substrate 410 may include various doped regions configuredfor a particular device in each region 412 and 414. In the depictedembodiment, the NFET will be formed in the device region 412, which isreferred to as an NFET device region, and the PFET device will be formedin the device region 414, which is referred to as a PFET device region.Accordingly, the device region 412 may include a doped region configuredfor an NFET device, and the device region 414 may include a doped regionconfigured for a PFET device.

Isolation feature 416 is formed in the substrate 410 to isolate variousregions of the substrate 410, such as device regions 412 and 414. Theisolation feature 416 also isolates the device regions 412 and 414 fromother devices (not shown). The isolation feature 416 utilizes isolationtechnology, such as local oxidation of silicon (LOCOS) and/or shallowtrench isolation (STI), to define and electrically isolate the variousregions. The isolation feature 416 comprises silicon oxide, siliconnitride, silicon oxynitride, other suitable materials, or combinationsthereof. The isolation feature 416 is formed by any suitable process. Asone example, forming an STI includes a photolithography process, etchinga trench in the substrate (for example, by using a dry etching and/orwet etching), and filling the trench (for example, by using a chemicalvapor deposition process) with one or more dielectric materials. Forexample, the filled trench may have a multi-layer structure, such as athermal oxide liner layer filled with silicon nitride or silicon oxide.In another example, the STI structure may be created using a processingsequence such as: growing a pad oxide, forming a low pressure chemicalvapor deposition (LPCVD) nitride layer, patterning an STI opening usingphotoresist and masking, etching a trench in the substrate, optionallygrowing a thermal oxide trench liner to improve the trench interface,filling the trench with oxide, using chemical mechanical polishing (CMP)processing to etch back and planarize, and using a nitride strippingprocess to remove the silicon nitride.

The integrated circuit device 400 includes a gate structure 420 for theNFET device and a gate structure 421 for the PFET device. The gatestructure 420 is disposed over the substrate 410 in NFET device region412, and the gate structure 421 is disposed over the substrate 410 inPFET device region 414. In the depicted embodiment, the gate structures420 and 421 include a gate dielectric layer 422, a gate layer 424(referred to as a gate electrode), and a hard mask layer 426. The gatedielectric layer 422, gate layer 424, and hard mask layer 426 form gatestacks for the gate structures 420 and 421. The gate stacks 420 and 421may include additional layers as is known in the art. The gatestructures 420 and 421 are formed by deposition, lithography patterning,etching processes, or combination thereof. The deposition processesinclude chemical vapor deposition (CVD), physical vapor deposition(PVD), atomic layer deposition (ALD), high density plasma CVD (HDPCVD),metal organic CVD (MOCVD), remote plasma CVD (RPCVD), plasma enhancedCVD (PECVD), plating, other suitable deposition methods, or combinationsthereof. The lithography patterning processes include photoresistcoating (e.g., spin-on coating), soft baking, mask aligning, exposure,post-exposure baking, developing the photoresist, rinsing, drying (e.g.,hard baking), other suitable processes, or combinations thereof.Alternatively, the photolithography exposing process is implemented orreplaced by other proper methods, such as maskless photolithography,electron-beam writing, or ion-beam writing. The etching processesinclude dry etching, wet etching, other etching methods, or combinationsthereof. The gate structures 420 and 421 may be formed simultaneously,utilizing the same processing steps and processing materials;independently of one another, utilizing varying processing steps andprocessing materials; or using a combination of simultaneous andindependent processing steps and processing materials.

The gate dielectric layer 422 is formed over the substrate 410 andincludes a dielectric material, such as silicon oxide, siliconoxynitride, silicon nitride, a high-k dielectric material, othersuitable dielectric material, or combinations thereof. Exemplary high-kdielectric materials include HfO₂, HfSiO, HfSiON, HfTaO, HfTiO, HfZrO,other suitable materials, or combinations thereof. The gate dielectriclayer 422 may include a multilayer structure. For example, the gatedielectric layer 422 may include an interfacial layer, and a high-kdielectric material layer formed on the interfacial layer. An exemplaryinterfacial layer may be a grown silicon oxide layer formed by a thermalprocess or ALD process.

The gate layer 424 is formed over the gate dielectric layer 422. In thepresent embodiment, the gate layer 424 is a polycrystalline silicon(polysilicon) layer. The polysilicon layer may be doped for properconductivity. Alternatively, the polysilicon is not necessarily doped ifa dummy gate is to be formed and replaced in a subsequent gatereplacement process. Alternatively, the gate layer 424 could include aconductive layer having a proper work function, therefore, the gatelayer 424 can also be referred to as a work function layer. The workfunction layer comprises any suitable material, such that the layer canbe tuned to have a proper work function for enhanced performance of theassociated device. For example, if a p-type work function metal(p-metal) for the PFET device is desired, TiN or TaN may be used. On theother hand, if an n-type work function metal (n-metal) for the NFETdevice is desired, Ta, TiAl, TiAlN, or TaCN, may be used. The workfunction layer may include doped conducting oxide materials. The gatelayer 424 may include other conductive materials, such as aluminum,copper, tungsten, metal alloys, metal silicide, other suitablematerials, or combinations thereof. For example, where the gate layer424 includes a work function layer, another conductive layer can beformed over the work function layer.

The hard mask layer 426 is formed over the gate layer 424. The hard masklayer 426 includes silicon oxide, silicon nitride, silicon oxynitride,silicon carbide, other suitable dielectric material, or combinationsthereof. The hard mask layer 426 may have a multi-layer structure.

In FIG. 13, lightly doped source/drain (LDD) regions are formed insource and drain regions of the substrate 410 in the device regions 412and 414. In the depicted embodiment, LDD regions 428 are formed in thesubstrate 410, interposed by the gate structure 420, in the NFET deviceregion 412; and LDD regions 430 are formed in the substrate 410,interposed by the gate structure 421, in the PFET device region 414. TheLDD regions 428 and 430 are aligned with the sidewalls of the gatestacks of the gate structures 420 and 421. The LDD regions 428 and 430are formed by an ion implantation process, diffusion process, othersuitable process, or combination thereof. The PFET device region 414 maybe protected during formation of the LDD regions 428 in the NFET deviceregion 412, and the NFET device region 412 may be protected duringformation of the LDD regions 430 in the PFET device region 414. Forexample, a photoresist layer or hard mask layer may be deposited andpatterned over the PFET device region 414 during formation of the LDDregions 428 in the NFET device region 412, and a photoresist layer orhard mask layer can be deposited and patterned over the NFET deviceregion 412 during formation of the LDD regions 430 in the PFET deviceregion 414. In the depicted embodiment, the LDD regions 428 for the NFETdevice (NLDD) are doped with an n-type dopant, such as phosphorous orarsenic, and the LDD regions 430 for the PFET device (PLDD) are dopedwith a p-type dopant, such as boron or BF₂.

In FIG. 14, spacer liner 432 and offset (dummy) spacers 434 may beformed for the gate structures 420 and 421. In the depicted embodiment,the spacer liner 432 comprises an oxide material, such as silicon oxide,and the offset spacers 434 comprise a nitride material, such as siliconnitride. Alternatively, the offset spacers 434 includes another suitabledielectric material, such as silicon oxide, silicon oxynitride, orcombinations thereof. The spacer liner 432 may also comprise anothersuitable dielectric material. The spacer liner 432 and offset spacers434 are formed by a suitable process. For example, the spacer liner 432and offset spacers 434 are formed by blanket depositing a firstdielectric layer (a silicon oxide layer) over the integrated circuitdevice 400 and a second dielectric layer (a silicon nitride layer) overthe first dielectric layer, and then, anisotropically etching to removethe dielectric layers to form the spacer liner 432 and offset spacers434 as illustrated in FIG. 14. The spacer liner 432 and offset spacers434 are positioned adjacent the sidewalls of the gate stacks (gatedielectric layer 422, gate layer 424, and hard mask layer 426) of thegate structures 420 and 421.

In FIG. 15, doped regions are formed in the substrate 410 in the PFETdevice region 414. A resist layer (or hard mask layer) 436 is depositedand patterned over the NFET device region 412, and an implantationprocess 438 is performed on the PFET device region 414 to form dopedregions 440 in the substrate 410 in the PFET device region 414. Theimplantation process 438 is a tilt-angle ion implantation. Thetilt-angle ion implantation process implements an ion beam with an angleto a direction perpendicular to the substrate 410. In the depictedembodiment, a tilt-angle of about 15° to about 25° is utilized. Theimplantation process 438 utilizes a dopant type opposite the dopant typeof the LDD regions 430. In the depicted embodiment, since the LDDregions 430 are doped with a p-type dopant, the doped regions 440 aredoped with an n-type dopant, such as phosphorous or arsenic. The dopedregions 440 in the substrate 410 are interposed by the gate structure421, similar to the LDD regions 430, yet the doped regions 440 arealigned with the offset spacers 434 and spaced a distance away from thegate structure 421. After the implantation process 438, LDD regions 430Aremain in the substrate 410 in the PFET device region 414. As furtherdiscussed below, since the doped regions 440 have a different dopingspecies than the remaining LDD regions 430A, the etching rate of thesubstrate 410 including the doped regions 440 is greater than thesubstrate 410 including the LDD regions 430A. Thereafter, the patternedresist layer 436 is removed by a photoresist stripping process, forexample.

In FIGS. 16-21, source/drain engineering is performed to configure thesource/drain region of the NFET device region 412 for an NFET device andto configure the source/drain region of the PFET device region 414 for aPFET device. In FIGS. 16 and 17, source/drain (S/D) features are formedin the NFET device region 412. For example, in FIG. 16, portions of thesubstrate 410 are removed at either side of the gate structure 420 inthe NFET device region 412, particularly in the source and drain regionof the NFET device. In the depicted embodiment, a capping layer 442,another capping layer 444, and a photoresist layer 446 are formed overthe integrated circuit device 400 and patterned to protect the PFETdevice during processing of the NFET device region 412. The cappinglayer 442 may comprise an oxide material, and capping layer 444 maycomprise a nitride material. The capping layers 442 and 444 may compriseother suitable materials as known in the art. The photoresist layer 446may include an antireflective coating layer, such as a bottomantireflective coating (BARC) layer and/or a top antireflective coating(TARC) layer. The patterned layers 442, 444, and 446 may be formed by aphotolithography process. An exemplary photolithography process mayinclude processing steps of photoresist coating, soft baking, maskaligning, exposing, post-exposure baking, developing photoresist, andhard baking. The photolithography process may also be implemented orreplaced by other proper techniques, such as maskless photolithography,electron-beam writing, ion-beam writing, and molecular imprint.

An etching process then removes portions of the substrate 410 to formrecesses 448 in the substrate 410. The recesses 448 are formed in thesource and drain regions of the NFET device in the NFET device region412. The etching process includes a dry etching process, wet etchingprocess, or combination thereof. In the depicted embodiment, the etchingprocess utilizes a combination dry and wet etching. The dry and wetetching processes have etching parameters that can be tuned, such asetchants used, etching temperature, etching solution concentration,etching pressure, source power, RF bias voltage, RF bias power, etchantflow rate, and other suitable parameters. For example, the dry etchingprocess may utilize an etching pressure of about 1 mT to about 200 mT, asource power of about 200 W to about 2000 W, an RF bias voltage of about0 V to about 100 V, and an etchant that includes NF₃, Cl₂, SF₆, He, Ar,CF₄, or combinations thereof. In an example, the dry etching processincludes an etching pressure of about 1 mT to about 200 mT, a sourcepower of about 200 W to about 2000 W, an RF bias voltage of about 0 V toabout 100 V, a NF₃ gas flow of about 5 sccm to about 30 sccm, a Cl₂ gasflow of about 0 sccm to about 100 sccm, an He gas flow of about 0 sccmto about 500 sccm, and an Ar gas flow of about 0 sccm to about 500 sccm.In another example, the etching process includes an etching pressure ofabout 1 mT to about 200 mT, a source power of about 200 W to about 2000W, an RF bias voltage of about 0 V to about 100 V, a SF₆ gas flow ofabout 5 sccm to about 30 sccm, a Cl₂ gas flow of about 0 sccm to about100 sccm, an He gas flow of about 0 sccm to about 500 sccm, and an Argas flow of about 0 sccm to about 500 sccm. In yet another example, theetching process includes an etching pressure of about 1 mT to about 200mT, a source power of about 200 W to about 2000 W, an RF bias voltage ofabout 0 V to about 100 V, a CF₄ gas flow of about 5 sccm to about 100sccm, a Cl₂ gas flow of about 0 sccm to about 100 sccm, an He gas flowof about 0 sccm to about 500 sccm, and an Ar gas flow of about 0 sccm toabout 500 sccm. The wet etching solutions may include NH₄OH, HF(hydrofluoric acid), TMAH (tetramethylammonium hydroxide), othersuitable wet etching solutions, or combinations thereof. In an example,the wet etching process first implements a 100:1 concentration of an HFsolution at room temperature, and then implements a NH₄OH solution at atemperature of about 20° C. to about 60° C. In another example, the wetetching process first implements a 100:1 concentration of an HF solutionat room temperature, and then implements a TMAH solution at atemperature of about 20° C. to about 60° C. After the etching process, apre-cleaning process may be performed to clean the recesses 448 with ahydrofluoric acid (HF) solution or other suitable solution.

In FIG. 17, a semiconductor material is deposited in the recesses 448 toform source and drain features 450. The source and drain features 450may alternatively be referred to as raised source and drain regions. Inthe depicted embodiment, an epitaxy or epitaxial (epi) process isperformed to deposit the semiconductor material in the recesses 448. Theepi process may include a selective epitaxy growth (SEG) process, CVDdeposition techniques (e.g., vapor-phase epitaxy (VPE) and/or ultra-highvacuum CVD (UHV-CVD)), molecular beam epitaxy, other suitable epiprocesses, or combination thereof. The epi process may use gaseousand/or liquid precursors, which may interact with the composition of thesubstrate 410. In the depicted embodiment, the source and drain features450 include epitaxially grown silicon (epi Si). The Si epi source anddrain features 450 of the NFET device associated with the gate structure420 may be in-situ doped or undoped during the epi process. For example,the Si epi source and drain features 252 may be doped with phosphorousto form Si:P source and drain features. When the source and drainfeatures are undoped, it is understood that they may be doped in asubsequent process. The doping may be achieved by an ion implantationprocess, plasma immersion ion implantation (PIII) process, gas and/orsolid source diffusion process, other suitable process, or combinationsthereof. The source and drain features 450 may further be exposed toannealing processes, such as a rapid thermal annealing process.Thereafter, the patterned layers 442, 444, and 446 are removed by asuitable process.

In FIG. 18, spacers 452 (referred to as main spacers) are formed for thegate structures 420 and 421 by a suitable process. For example, thespacers 452 are formed by blanket depositing a dielectric layer, such asa silicon nitride layer, over the integrated circuit device 400, andthen, anisotropically etching to remove the dielectric layer to form thespacers 452 as illustrated in FIG. 18. The spacers 452 are positioned onthe sidewalls of the gate structures 420 and 421, and in the depictedembodiment, adjacent the offset spacers 434. The spacers 452 comprise adielectric material, such as silicon nitride, silicon oxide, siliconoxynitride, other suitable materials, or combinations thereof.

In FIGS. 19A, 19B, and 20, source/drain (S/D) features are formed in thePFET device region 414. For example, in FIG. 19A, portions of thesubstrate 410 are removed at either side of the gate structure 421 inthe PFET device region 414, particularly in the source and drain regionof the PFET device. In the depicted embodiment, a capping layer 454,another capping layer 456, and a photoresist layer 458 are formed overthe integrated circuit device 400 and patterned to protect the NFETdevice during processing of the PFET device region 414. The cappinglayer 454 may comprise an oxide material, and capping layer 456 maycomprise a nitride material. The capping layers 454 and 456 may compriseother suitable materials as known in the art. The photoresist layer 458may include an antireflective coating layer, such as a BARC layer and/ora TARC layer. The patterned layers 454, 456, and 458 may be formed by aphotolithography process. An exemplary photolithography process mayinclude processing steps of photoresist coating, soft baking, maskaligning, exposing, post-exposure baking, developing photoresist, andhard baking. The photolithography process may also be implemented orreplaced by other proper techniques, such as maskless photolithography,electron-beam writing, ion-beam writing, and molecular imprint.

An etching process then removes portions of the substrate 410 to formrecesses 460 in the substrate 410. The recesses 460 are formed in thesource and drain regions of the PFET device in the PFET device region414. The etching process includes a dry etching process, wet etchingprocess, or combination thereof. In the depicted embodiment, the etchingprocess utilizes a combination dry and wet etching. The dry and wetetching processes have etching parameters that can be tuned, such asetchants used, etching temperature, etching solution concentration,etching pressure, source power, RF bias voltage, RF bias power, etchantflow rate, and other suitable parameters. For example, the dry etchingprocess may utilize an etching pressure of about 1 mT to about 200 mT, asource power of about 200 W to about 2000 W, an RF bias voltage of about0 V to about 100 V, and an etchant that includes NF₃, Cl₂, SF₆, He, Ar,CF₄, or combinations thereof. In an example, the dry etching processincludes an etching pressure of about 1 mT to about 200 mT, a sourcepower of about 200 W to about 2000 W, an RF bias voltage of about 0 V toabout 100 V, a NF₃ gas flow of about 5 sccm to about 30 sccm, a Cl₂ gasflow of about 0 sccm to about 100 sccm, an He gas flow of about 0 sccmto about 500 sccm, and an Ar gas flow of about 0 sccm to about 500 sccm.In another example, the etching process includes an etching pressure ofabout 1 mT to about 200 mT, a source power of about 200 W to about 2000W, an RF bias voltage of about 0 V to about 100 V, a SF₆ gas flow ofabout 5 sccm to about 30 sccm, a Cl₂ gas flow of about 0 sccm to about100 sccm, an He gas flow of about 0 sccm to about 500 sccm, and an Argas flow of about 0 sccm to about 500 sccm. In yet another example, theetching process includes an etching pressure of about 1 mT to about 200mT, a source power of about 200 W to about 2000 W, an RF bias voltage ofabout 0 V to about 100 V, a CF₄ gas flow of about 5 sccm to about 100sccm, a Cl₂ gas flow of about 0 sccm to about 100 sccm, an He gas flowof about 0 sccm to about 500 sccm, and an Ar gas flow of about 0 sccm toabout 500 sccm. The wet etching solutions may include NH₄OH, HF(hydrofluoric acid), TMAH (tetramethylammonium hydroxide), othersuitable wet etching solutions, or combinations thereof. In an example,the wet etching process first implements a 100:1 concentration of an HFsolution at room temperature, and then implements a NH₄OH solution at atemperature of about 20° C. to about 60° C. In another example, the wetetching process first implements a 100:1 concentration of an HF solutionat room temperature, and then implements a TMAH solution at atemperature of about 20° C. to about 60° C. After the etching process, apre-cleaning process may be performed to clean the recesses 460 with ahydrofluoric acid (HF) solution or other suitable solution.

The etching profile of the recesses 460 enhances performance of theintegrated circuit device 400. In FIG. 19B, the PFET device region 414of the integrated circuit device 400 is enlarged for betterunderstanding of the etching profile of recesses 460. The etchingprofile of the recesses 460 defines source and drain regions of the PFETdevice, and the etching profile of the recesses is defined by facets461A, 461B, 461C, 461D, 461E, and 461F of the substrate 410. The facets461A, 461B, 461D, and 461E may be referred to as shallow facets, and thefacets 461C and 461F may be referred to as bottom facets. In thedepicted embodiment, the etching profile of the recesses 460 is definedby facets 461A, 461B, 461D, and 461E in a {111} crystallographic planeof the substrate 410, and facets 461C and 461F in a {100}crystallographic plane of the substrate 410. An angle α₁ between theshallow facets 461A and 461B is from about 45.0° to about 80.0°, and anangle θ₁ between the facets 461B and 461C is from about 50.0° to about70.0°. An angle α₂ between the shallow facets 461C and 461D is fromabout 45.0° to about 80.0°, and an angle θ₂ between the facets 461E and461F of the substrate 410 is from about 50.0° to about 70.0°. In thedepicted embodiment, α₁ and α₂ are about 54.7°, and θ₁ and θ₂ are about54.7°.

The recesses 460 further define a surface proximity and a tip depth (orheight). The surface proximity defines a distance that a top surface ofthe substrate 410 extends from a sidewall of the gate structure 421(i.e., gate stack including gate dielectric layer 422, gate layer 424,and hard mask layer 426) to the recess 460 (or when the recess isfilled, a source and drain feature). In the depicted embodiment, thedisclosed etching profile of the recesses 460 achieves a surfaceproximity of about 1 nm to about 3 nm. The tip depth defines a distancebetween a top surface of the substrate 410 and an intersection of thefacets 461A and 461B (or an intersection of the facets 461D and 461E).In the depicted embodiment, the etching profile of the recesses 460achieves a tip depth of about 5 nm to about 10 nm.

The etching profile of the recesses 460, which improves deviceperformance, is achieved by the method 300 described herein. Typically,to enhance the performance of integrated circuit device 400, a trade-offoccurs. For example, conventional processing reduces the surfaceproximity to improve saturation current, which often results in a largertip height, thus leading to increased short channel effects and reducedon/off speed of the integrated circuit device. Accordingly, precisecontrol over the etching profile of the recesses 460 is desired,particularly precise control over the resulting surface proximity andtip shape of the source and drain features. The disclosed method 300provides this desired control, resulting in the etching profile ofrecesses 460 as described with reference to FIGS. 19A and 19B. Inparticular, referring to FIG. 15 above, doped regions 440 were formed inthe source and drain regions of the PFET device, leaving LDD regions430A. As noted above, the additional implantation process implemented toform the doped regions 440 enhances the etching rate of a surface areaof the substrate 410 to etching processes used to from the recesses 460.In particular, a difference in etching rate between substrate 410including the doped regions 440 and the substrate 410 including the LDDregions 430A is increased. The LDD regions 430A can thus act as a dryetch slow down and a wet etch stop to the etching processes used to formthe recesses 460, allowing the LDD regions 430A to be designed toachieve a desired surface proximity and tip depth.

In FIG. 20, a semiconductor material is deposited in the recesses 460 toform a strained structure in the PFET device region 414. In the depictedembodiment, an epitaxy or epitaxial (epi) process is performed todeposit the semiconductor material in the recesses 460. The epi processmay include a selective epitaxy growth (SEG) process, CVD depositiontechniques (e.g., vapor-phase epitaxy (VPE) and/or ultra-high vacuum CVD(UHV-CVD)), molecular beam epitaxy, other suitable epi processes, orcombination thereof. The epi process may use gaseous and/or liquidprecursors, which may interact with the composition of the substrate410. The deposited semiconductor material is different from thesubstrate 410. Accordingly, the channel region of the PFET device isstrained or stressed to enhance carrier mobility of the device andenhance device performance. In the depicted embodiment, the patternedphotoresist layer 458 protecting the NFET device region 412 is removedbefore the epi process. Further, in the depicted embodiment, silicongermanium (SiGe) is deposited by an epi process in the recesses 460 ofthe substrate 410 to form SiGe source and drain features 462 in acrystalline state on the silicon substrate 410. The SiGe source anddrain features 462 may alternatively be referred to as raised source anddrain features. The source and drain features 462 of the PFET deviceassociated with the gate structure 221 may be in-situ doped or undopedduring the epi process. When the source and drain features are undoped,it is understood that they may be doped in a subsequent process. Thedoping may be achieved by an ion implantation process, plasma immersionion implantation (PIII) process, gas and/or solid source diffusionprocess, other suitable process, or combinations thereof. The source anddrain features 462 may further be exposed to annealing processes, suchas a rapid thermal annealing process.

Thereafter, the patterned capping layers 454 and 456 are removed by asuitable process as illustrated in FIG. 21. The integrated circuitdevice 400 continues with processing to complete fabrication asdiscussed briefly below. For example, heavily doped source/drain (HDD)regions for the NFET device in the NFET device region 412 may be formedby ion implantation of n-type dopants, such as phosphorous or arsenic,and HDD regions for the PFET device in the PFET device region 414 may beformed by ion implantation of p-type dopants, such as boron. It isunderstood that the HDD regions of the NFET and PFET device regions 412and 414 may be formed earlier than in the depicted embodiment.Additionally, silicide features are formed on the raised source/drainfeatures, for example, to reduce the contact resistance. The silicidefeatures may be formed on the source and drain regions by a processincluding depositing a metal layer, annealing the metal layer such thatthe metal layer is able to react with silicon to form silicide, and thenremoving the non-reacted metal layer.

An inter-level dielectric (ILD) layer is formed on the substrate and achemical mechanical polishing (CMP) process is further applied to thesubstrate to planarize the substrate. Further, a contact etch stop layer(CESL) may be formed on top of the gate structures 420 and 421 beforeforming the ILD layer. In an embodiment, the gate electrode 424 remainspoly in the final device. In another embodiment, the poly is removed andreplaced with a metal in a gate last or gate replacement process. In agate last process, the CMP process on the ILD layer is continued toexpose the poly of the gate structures, and an etching process isperformed to remove the poly, thereby forming trenches. The trenches arefilled with a proper work function metal (e.g., p-type work functionmetal and n-type work function metal) for the PFET devices and the NFETdevices.

A multilayer interconnection (MLI) including metal layers andinter-metal dielectric (IMD) is formed over the substrate 410 toelectrically connect various features or structures of the integratedcircuit device 400. The multilayer interconnection includes verticalinterconnects, such as conventional vias or contacts, and horizontalinterconnects, such as metal lines. The various interconnection featuresmay implement various conductive materials including copper, tungstenand silicide. In one example, a damascene process is used to form coppermultilayer interconnection structure.

The integrated circuit devices 200 and 400 serve only as examples. Theintegrated circuit devices 200 and 400 may be used in variousapplications such as digital circuitry, imaging sensor devices, ahetero-semiconductor device, dynamic random access memory (DRAM) cell, asingle electron transistor (SET), and/or other microelectronic devices(collectively referred to herein as microelectronic devices). Of course,aspects of the present disclosure are also applicable and/or readilyadaptable to other types of transistors, including single-gatetransistors, double-gate transistors, and other multiple-gatetransistors, and may be employed in many different applications,including sensor cells, memory cells, logic cells, and others.

In summary, the disclosed methods 100 and 300 provide improved controlover surface proximity and tip depth in the integrated circuit devices200 and 400. The improved control is achieved by, after forming LDDregions, performing an additional implant to form doped regions in thesource and drain regions of a device. The doped regions are formed byimplanting the substrate with a dopant type opposite a dopant type usedto form the LDD region. This can enhance etching selectivity of thesubstrate. It has been observed that the disclosed methods andintegrated circuit devices result in improved device performance,including but not limited to, improved control over short channeleffects, increased saturation current, improved control of metallurgicalgate length, increased carrier mobility, and decreased contactresistance between the source/drain and silicide features. It isunderstood that different embodiments may have different advantages, andthat no particular advantage is necessarily required of any embodiment.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A method comprising: forming a gate structureover a substrate; performing a first implantation process with a firstdopant on the substrate, thereby forming a first doped region;performing a second implantation process with a second dopant on thesubstrate, the second dopant being opposite the first dopant, therebyforming a second doped region; and forming a source and drain feature onat least one side of the gate structure by performing a combination of adry etching process and a wet etching process.
 2. The method of claim 1wherein the first doped region functions as a wet etching control duringthe forming the source and drain feature by performing the combinationof the dry etching process and the wet etching process.
 3. The method ofclaim 1 wherein the first doped region is a source and drain region. 4.The method of claim 1 wherein the first doped region is a light dopedregion (LDD).
 5. The method of claim 1 wherein the first doped region isinterposed by the gate structure.
 6. The method of claim 1 wherein thesecond doped region is interposed by the gate structure.
 7. The methodof claim 1 wherein the second doped region is spaced a distance from thegate structure.
 8. The method of claim 1 wherein one of the first andthe second dopants is a p-type dopant and another one of the first andthe second dopants is an n-type dopant.
 9. The method of claim 1 whereinthe performing the second implantation process further includes: forminga dielectric layer over the substrate; performing a second implantationprocess utilizing the dielectric layer as a mask; and utilizing thedielectric layer to form spacers.
 10. The method of claim 1 wherein theperforming the second implantation process further includes: performinga tilt-angle ion implantation process; and forming at least one offsetspacer along at least one sidewall of the gate structure.
 11. The methodof claim 1 wherein the forming the source and drain feature on at leastone side of the gate structure further includes: forming a recess in thesubstrate that defines the source and drain feature; and epitaxially(epi) growing a semiconductor material to fill the recess, therebyforming the source and drain feature.
 12. The method of claim 1 whereinforming source and drain feature on at least one side of the gatestructure further includes etching a first and second facet in a {111}crystallographic plane of the substrate and a third facet in a {100}crystallographic plane of the substrate.
 13. The method of claim 9wherein the second doped region is spaced a distance away from the gatestructure, the distance being a thickness of the dielectric layer alongat least one sidewall of the gate structure.
 14. The method of claim 12wherein the etching the first, second, and third facets includes:etching an angle of about 45.0° to about 80.0° between the first andsecond facets; and etching an angle of about 50.0° to about 70.0°between the second and third facets.
 15. A method comprising: forming agate stack over a substrate; forming a first doped region over thesubstrate with a first dopant; etching the substrate to form a pluralityof recesses interposed by the gate stack by performing a dry etchingprocess and a wet etching process; and epitaxially growing asemiconductor material to fill the recesses.
 16. The method of claim 15wherein the first doped region functions as a wet etching control duringthe dry etching process and the wet etching process.
 17. The method ofclaim 15 further comprising: forming a second doped region over thesubstrate with a second dopant.
 18. The method of claim 15 wherein thefirst doped region is a lightly doped source and drain (LDD) region inthe substrate.
 19. The method of claim 17 wherein one of the first andthe second dopants is a p-type dopant and another one of the first andthe second dopants is an n-type dopant.
 20. The method of claim 18 wherethe first doped region is interposed by the gate stack.